Abstract

A method and apparatus for stabilizing the seed laser in a laser produced plasma (LPP) extreme ultraviolet (EUV) light system are disclosed. In one embodiment, the cavity length of the laser may be adjusted by means of a movable mirror forming one end of the cavity. The time delay from the release of an output …

Legal parties

Party
Inventors (applicants): Richard L. Sandstrom
Assignees (initial): ASML Netherlands B.V. (Veldhoven, NL)
Agents: Gard & Kaslow LLP (attorney)

The application was examined by Colleen A Matthews (USPTO dept. 2828), Delma R Forde

Claims

  • 1. A system for producing output laser pulses, comprising: …
  • 2. The system of claim 1 further comprising a second feedback loop having a second …
  • 3. The system of claim 1 wherein the variable attenuator is an acousto-optic module. …

Cited documents

Patents

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  • Caprara et al. US 5412673 A / 372/19, May. 1, 1995
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Brief Description of the Drawings

FIG. 1 is an illustration of some of the components of an embodiment of an LPP EUV system. FIG. 2 is an illustration of some of the components of a seed …

Description

Field of the Invention

The present invention relates generally to laser produced plasma extreme ultraviolet light sources. More specifically, the invention relates to a method and apparatus for the use of seed lasers as such …

Detailed Description of the Invention

The present application describes a method and apparatus for stabilizing a seed laser source(s) such as might be used in a laser produced plasma (LPP) extreme ultraviolet (EUV) light system. …

More details about System and Method for Seed Laser Mode Stabilization

Miscellaneous patent data

Categorized under Having feedback circuitry as a primary classification, the protection scope is defined by 19 claims, the exemplary patent drawings are Illustration of some of the components, Graph of the gain bandwidth, Illustration of some of the components, System and Method for Seed, the application was examined by Colleen A Matthews, the assistant Delma R Forde (2828 USPTO department), similar patents are classified under Lasers provided with means to change the location from which, or the direction in which, laser radiation is emitted, transversely excited, a semiconductor, e.g. light emitting diode, Laser Logic System, Electrodes, e.g. special shape, configuration or composition, Structure or shape of the active region, Materials used for the active region, Liquids, Having fault protection circuitry, Solar, Phase, using an electro-optical device, e.g. exhibiting Pockels- or Kerr-effect, Constructional details, Buried mesa structure, Free Electron Laser, varying the potential of the electrodes, the patent grant was extended by 113 days, invented by Richard L. Sandstrom, the invention description is illustrated by 10 drawings, the claim 1 is exemplary as chosen by the examiner, the applicant's last name is Sandstrom, and his first name is Richard L., the applicant's city - San Diego, state - CA, the grant number is 08811440 (publication number), the agent's company - Gard & Kaslow LLP, the invention is named System and Method for Seed Laser Mode Stabilization, the application publication date is Sep. 7, 2012, the grant publication date is Aug. 19, 2014, the published inventor's name is Richard L. Sandstrom, the inventor's address - San Diego, CA, the application number is 13/607,623 (U.S.), the assignee classification - a foreign company or corporation, the patent particularly claims a system for producing output laser pulses, comprising…, the assignee organization is ASML Netherlands B.V., located in Veldhoven (NL), explained by 10 figures.

Invention classification information

The invention is classified under Q-switch, Having particular beam control circuit component, Rotating mirror, Having feedback circuitry, Electro-optic, Specified cavity component, For driving or controlling laser, Feedback circuitry, Plural Q-switches, Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves, Tuning, Stabilisation of laser output parameters, e.g. frequency, amplitude, Acousto-optic. The designated search classifications include Having particular beam control circuit component, Structural details or components not essential to laser action, Condition responsive, using an acousto-optical device, Feedback circuitry, by controlling the mutual position or the reflecting properties of the reflectors of the cavity, Plural Q-switches, Having feedback circuitry, Shaping, Q-switch, Rotating mirror, Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves, External cavity lasers, by controlling a device placed within the cavity, Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating, Rotating mirror, Specified cavity component, Electro-optic, Stabilisation of laser output parameters, e.g. frequency, amplitude, Acousto-optic, Plural Q-switches, With monitoring, Laser, using an electro-optical device, Beam energy control, Tuning, for stabilising of frequency.

Patent details
Publication number 08811440
Publication date Aug. 19, 2014
Kind code B2
Application number 13/607,623
Application date Sep. 7, 2012
Application type U
Application series code 13
Extension term 113
National classification 372/38.01
Total number of claims 19
Exemplary claims 1
Number of drawings 10
Number of figures 10
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