Abstract

A laser device includes a seed laser, an amplifier, a detector, and an optical element arranged to direct radiation emitted by the seed laser towards a plasma generation site. The optical element is arranged to direct towards the detector amplified spontaneous emission radiation which has been emitted by the seed laser and has been reflected …

Legal parties

Party
Inventors (applicants): Erik Roelof Loopstra, Erik Petrus Buurman, Gerardus Hubertus Petrus Maria Swinkels
Assignees (initial): ASML Netherlands B.V. (Veldhoven, NL)
Agents: Pillsbury Winthrop Shaw Pittman LLP (attorney)

The application was examined by Tod T Van Roy (USPTO dept. 2828), Delma R Forde

Claims

  • 1. A laser device comprising: …
  • 2. A laser device according to claim 1 , wherein the optical element is a mirror …
  • 3. A laser device according to claim 1 , wherein the detector is positioned such …

Cited documents

Patents

  • JP 2007-515774, Jun. 1, 2007
  • Krzysztof et al. US 2010/0220756 A1 / 372/38.02, Sep. 1, 2010
  • JP 2006-244837, Sep. 1, 2006
  • Fallon et al. US 2005/0265417 A1 / 372/55, Dec. 1, 2005
  • JP 2006-128157, May. 1, 2006
  • Hori et al. US 2012/0307851 A1 / 372/27, Dec. 1, 2012
  • WO 2008/088488, Jul. 1, 2008
  • Hori et al. US 2012/0243566 A1 / 372/27, Sep. 1, 2012
  • Partlo et al. US 2005/0205811 A1 / 250/504.R, Sep. 1, 2005
  • WO 2008/048415, Apr. 1, 2008
  • Anezaki et al. US 2006/0243238 A1 / 123/143.B, Nov. 1, 2006
  • Loopstra et al. US 2011/0013166 A1 / 355/67, Jan. 1, 2011
  • JP 2004-303725, Oct. 1, 2004
  • Wakabayashi et al. US 2010/0193710 A1 / 250/504.R, Aug. 1, 2010
  • JP 2008-283107, Nov. 1, 2008
  • Moriya et al. US 2010/0117009 A1 / 250/504.R, May. 1, 2010

Drawings

Brief Description of the Drawings

Embodiments of the invention will now be described, by way of example only, with reference to the accompanying schematic drawings in which corresponding reference symbols indicate corresponding parts …

Description

Field

The present invention relates to a laser device, and to a method of synchronizing a laser …

Cross-Reference to Related Applications

This application claims the benefit of priority from U.S. Provisional Patent Application No. 61/143,346, filed on Jan. 8, 2009, the entire content of which is incorporated herein by …

Detailed Description

FIG. 1 schematically depicts a lithographic apparatus 1 according to one embodiment of the invention. The apparatus includes: an illumination system (illuminator) IL configured to condition a radiation beam B (e.g. …

More details about Laser Device

Miscellaneous patent data

The application publication date is Jan. 7, 2010, similar categories include Heat sink, Gas dynamic, in which the quality factor of the optical resonator is rapidly changed, i.e. giant-pulse technique, Particular Component Circuitry, Electrical excitation, Rotating mirror, Having particular electrode structure, varying the potential of the electrodes, Rotating prism, controlling the active medium, e.g. by controlling the processes or apparatus for excitation, particularly claims a laser device comprising…, categorized under Having feedback circuitry as a primary classification, developed by Erik Petrus Buurman et al., the claim number 1 is selected as exemplary, the application was examined by Tod T Van Roy, the assistant Delma R Forde (2828 USPTO department), the exemplary patent drawings are Laser Device, radiation source of the lithographic, laser device of the radiation, embodiment of a lithographic apparatus, assigned to a foreign company or corporation, the grant number is 08462826, the published inventor's name is Swinkels Gerardus Hubertus Petrus Maria, the applicant's first name is Erik Roelof, and his last name is Loopstra, the invention is named Laser Device, numbered 12/683,612 (application), located in Veldhoven (NL), the assignee organization is ASML Netherlands B.V., the invention description is illustrated by 3 drawings, the recorded agent - Pillsbury Winthrop Shaw Pittman LLP, the protection scope is defined by 11 claims, the grant date is Jun. 11, 2013 (publication date), 3 figures are supplied with the description, the patent extension term is 328 days.

Invention classification information

The invention is classified under Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves, Irradiation of semiconductor devices, Pulse, Having feedback circuitry, Plasma. The designated search classifications include Plasma, Having feedback circuitry, Pulse, Focus or magnification control.

Patent details
Publication number 08462826
Publication date Jun. 11, 2013
Kind code B2
Application number 12/683,612
Application date Jan. 7, 2010
Application type U
Application series code 12
Extension term 328
National classification 372/38.01
Total number of claims 11
Exemplary claims 1
Number of drawings 3
Number of figures 3
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