Abstract

The invention relates to an antireflective coating composition comprising a crosslinker and a crosslinkable polymer capable of being crosslinked by the crosslinker, where the crosslinkable polymer comprises a unit represented by structure: A-B …

Legal parties

Party
Inventors (applicants): M. Dalil Rahman, Guanyang Lin, JoonYeon Cho, Douglas McKenzie, Yi Yl, Huirong Yao
Assignees (initial): AZ Electronic Materials USA Corp. (Somerville, US)
Agents: Sangya Jain (attorney)

The application was examined by Cynthia Hamilton (USPTO dept. 1722)

Claims

  • 1. An antireflective coating composition comprising a crosslinker and a crosslinkable polymer capable of being …
  • 2. The composition of claim 1 , where the polymer in the composition is free …
  • 3. The composition of claim 1 , where R 1 is methyl and R 2 is methyl. …

Cited documents

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Drawings

Brief Description of Drawings

FIG. 1 illustrates a process …

Description

Summary of the Invention

The invention relates to an antireflective coating composition comprising a crosslinker and a crosslinkable polymer capable of being crosslinked by the crosslinker, where the crosslinkable polymer comprises a unit represented …

Detailed Description of the Invention

The present invention relates to an absorbing antireflective coating composition comprising a crosslinker and a crosslinkable polymer capable of being crosslinked with the crosslinker, where the polymer comprises at least …

Examples

The refractive index (n) and the absorption (k) values of the carbon hard mask antireflective coating in the Examples below were measured on a J. A. Woollam VASE32 ellipsometer. The molecular …

More details about Antireflective Coating Composition and Process Thereof

Miscellaneous patent data

The grant publication date is Jul. 16, 2013, the application number is 12/646,191 (U.S.), the assignee classification - a United States company, 17 claims comprise the protection scope, the applicant's city - Whitehouse Station, state - NJ, the published applicant's name is Guanyang Lin, the known agent's name is Sangya Jain, located in Somerville (US), the assignee organization is AZ Electronic Materials USA Corp., the grant publication number is 08486609, the inventor's address - Bridgewater, NJ, the recorded inventor's name is JoonYeon Cho, categorized under Making electrical device as a primary classification, developed by Yi Yl et al., the invention is named Antireflective Coating Composition and Process Thereof, the claims 1 and 17 are exemplary as chosen by the examiner, the application was published on Dec. 23, 2009, similar categories include Auxiliary processes, e.g. cleaning, Adapting basic layout or design of masks to lithographic process requirements, e.g. second iteration correction of mask patterns for imaging, using cross-line screens, Rim PSM or outrigger PSM, Preparation thereof, Electrical or magnetic parameter, Silver bleach or bleach-fix, multiple exposure, e.g. combined processes for line photo and screen, Dye Mordant, Having more than two constituents, Using inorganic or organometallic complex, the examination was conducted by Cynthia Hamilton (primary examiner, 1722 USPTO department), the invention description is illustrated by 1 drawings, the patent extension term is 682 days, includes the following drawings: Antireflective Coating Composition and Process, process of imaging, the patent particularly claims an antireflective coating composition comprising a crosslinker…, 1 figures are supplied with the description.

Invention classification information

The invention is classified under Identified backing or protective layer containing, Solid polymer derived from phenolic reactant, Making electrical device, having cover layers or intermediate layers, e.g. subbing layers, Liquid compositions therefor, e.g. developers, Post image treatment to produce elevated pattern, Pattern elevated in radiation unexposed areas, Polymers modified by chemical after-treatment, Silicon containing backing or protective layer, Coating compositions based on macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain, Coating compositions based on derivatives of such polymers.

Patent details
Publication number 08486609
Publication date Jul. 16, 2013
Kind code B2
Application number 12/646,191
Application date Dec. 23, 2009
Application type U
Application series code 12
Extension term 682
National classification 430/311
Total number of claims 17
Exemplary claims 1, 17
Number of drawings 1
Number of figures 1
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