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6 KHz and Above Gas Discharge Laser System
US 08855166 B2, Oct. 7, 2014, Walter D. Gillespie et al. / Cymer, LLC (San Diego, US)
A high repetition rate gas discharge laser system comprising:…

High Fill-Factor Efficient Vertical-Cavity Surface Emitting Laser Arrays
US 08537874 B2, Sept. 17, 2013, Chad Wang et al. / Flir Systems, Inc. (Wilsonville, US)
An apparatus comprising:…

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