Featured patents

Air Knife Chamber Including Blocking Member
US 08667704 B2, March 11, 2014, Su-Chan Park et al. / LG Chem, Ltd. (Seoul, KR)
An air knife chamber comprising:…

Apparatus for Purge to Prevent Airborne Molecular Contaminant (AMC) and Natural Oxide
US 08832960 B2, Sept. 16, 2014, Bong-Ho Kim / LS TEC Co., Ltd. (Gyeonggi-Do, KR)
An apparatus for purge to prevent AMC & natural oxide, the apparatus…

Heat Processing Apparatus and Heat Processing Method
US 08782918 B2, July 22, 2014, Hiroshi Shinya et al. / Tokyo Electron Limited (Tokyo, JP)
A heat processing apparatus comprising:…

Methods and Apparatus for Drying a Substrate
US 08635784 B2, Jan. 28, 2014, Ho Seon Shin et al. / Applied Materials, Inc. (Santa Clara, US)
A pusher pin for use during substrate drying comprising:…

System and Method for Spray Drying a Liquid
US 08601712 B2, Dec. 10, 2013, Dennis Brian Hubbard, Jr. et al. / Velico Medical, Inc. (Beverly, US)
A spray drying collection device, comprising:…

Systems and Methods for Drying a Rotating Substrate
US 08739429 B2, June 3, 2014, Ismail Kashkoush et al.
A system for drying a surface of a substrate comprising:…

Patentorg has 6 documents under Recirculation of Treating Gas or Vapor Patents.

Other subcategories for category Drying and gas or vapor contact with solids
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