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Fluid Heater, Manufacturing Method Thereof, Substrate Processing Apparatus Including Fluid Heater, and Substrate Processing Method
US 08701308 B2, April 22, 2014, Takayuki Toshima et al. / Tokyo Electron Limited (Minato-Ku, JP)
A fluid heater configured to heat an organic solvent, comprising:…

System for Drying and Torrefaction
US 08549769 B2, Oct. 8, 2013, Joseph Bevacqua et al. / Wyssmont Company Inc. (Fort Lee, US)
An apparatus for the torrefaction of cellulose containing material, comprising:…

Patentorg has 2 documents under With Sealing of Treating Chamber Patents.

Other subcategories for category Drying and gas or vapor contact with solids
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