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Methods and Apparatus for Marangoni Substrate Drying Using a Vapor Knife Manifold
US 08869422 B2, Oct. 28, 2014, Jim K. Atkinson et al. / Applied Materials, Inc. (Santa Clara, US)
A Marangoni vapor knife assembly comprising:…

Patentorg has 1 document under Treating Agent Is Steam Patents.

Other subcategories for category Drying and gas or vapor contact with solids
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